Process materials (gases and chemicals)

Which gas, one of the most heavily used in semiconductor fabs, is supplied by pipeline for purging and as an atmosphere gas?

  1. APhosphine
  2. BNitrogen (N2)
  3. CNitrogen trifluoride (NF3)
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Answer: B. Nitrogen (N2)

Nitrogen is inert and cheap, so it is used in large quantities to purge equipment and piping, replace the atmosphere in FOUPs and equipment, and purge vacuum pumps. It is common to produce nitrogen on site and supply it by pipeline. Because it is used in such quantities, oxygen deficiency must also be watched for.

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