Process materials (gases and chemicals)

What is the main use of nitrogen trifluoride (NF3)?

  1. ALight source for exposure tools
  2. BMain component of plating baths
  3. CCleaning films deposited inside CVD chambers
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Answer: C. Cleaning films deposited inside CVD chambers

Repeated CVD deposits film on the chamber walls too, which can flake off and cause particles. Fluorine radicals made by decomposing NF3 in a plasma remove these deposits. Because NF3 has a high global warming potential, it is decomposed in abatement systems after use.

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