What is Specialty gases?
High-purity gases with toxic or flammable properties used in semiconductor manufacturing, such as silane, arsine and phosphine. They are supplied under strict control.
Specialty gases in the explanations
Specialty gases for semiconductors often require even higher purity.
What purity does '6N' denote for a gas?Exhaust gas from deposition and etching equipment contains unreacted specialty gases and harmful by-products.
For process equipment using vacuum, which device treats exh…
Questions that mention Specialty gases (3)
Related terms
Abatement system Arsine (AsH3) Mass flow controller (MFC) NF3 (nitrogen trifluoride) Phosphine (PH3) Precursor Silane (SiH4) TMAH Ultrapure water