What is Isotropic etching?

Etching that proceeds at the same rate vertically and laterally. It cuts in under the mask (undercut).

Field: Etching

Isotropic etching in the explanations

Isotropic etching proceeds equally downward and sideways, so by the time 1 µm of film clears to the underlayer, the mask edge is undercut by about 1 µm, and overetch increases this further.
When a 1 µm film is etched just down to the underlayer by p…

Questions that mention Isotropic etching (1)

When a 1 µm film is etched just down to the underlayer by perfectly isotropic wet etching, roughly how much is etched laterally from the mask edge (undercut)?

Related terms

Wet etching Overetch MEMS ALE (atomic layer etching) Anisotropic etching Antenna effect ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Buffered hydrofluoric acid (BHF)

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