Ion implantation

In an ion implanter, which component measures the beam current to determine the number of implanted ions (dose)?

  1. AFaraday cup
  2. BMicrolens
  3. CPellicle
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Answer: A. Faraday cup

A Faraday cup catches the ion beam and measures its charge as a current. Since the charge per ion is known, integrating the current over time gives the number of implanted ions, that is, the dose.

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More Ion implantation questions

  1. When forming shallow p-type junctions, what is the main purpose of implanting carbon or similar species together with boron (co-implantation)?
  2. Which gas is typically used in the ion source of an implanter to produce boron ions?
  3. Which is an example of an application of high-energy ion implantation reaching several MeV?
  4. If dopants with a dose of 1×10¹⁵ cm⁻² are distributed uniformly over a depth of 100 nm, what is the approximate average concentration?
  5. Which ion implantation is used for wafer splitting (Smart Cut) and for lifetime control in power devices?