What is Projected range?

The average depth at which implanted ions come to rest. It is deeper with higher acceleration energy and with lighter ions.

Field: Ion implantation

Projected range in the explanations

Implanted profiles approximate a Gaussian whose peak depth is the projected range Rp and whose width is the straggle ΔRp; peak concentration is roughly dose ÷ (2.5 × ΔRp).
Which correctly pairs the distribution that approximates th…

Questions that mention Projected range (1)

Which correctly pairs the distribution that approximates the depth profile of implanted dopants with the term for the depth of its peak?

Related terms

Channeling Annealing Faraday cup Halo implant (pocket implant) Implant dose Ion implantation Laser anneal Plasma doping Pre-amorphization implant (PAI) Retrograde well

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