What is Retrograde well?

A well whose doping is higher deeper below the surface, made by high-energy implantation. It suppresses punch-through and latch-up while keeping the channel doping at the surface low.

Field: Ion implantation

Retrograde well in the explanations

A retrograde well uses high-energy implants of hundreds of keV to MeV to place its peak doping deep below the surface.
In CMOS well formation, what is a well called in which high…

Questions that mention Retrograde well (1)

In CMOS well formation, what is a well called in which high-energy implantation makes the dopant concentration higher deep below the surface?

Related terms

CMOS Punch-through Latch-up Annealing Channeling Faraday cup Halo implant (pocket implant) Implant dose Ion implantation Laser anneal

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