What is Stacking fault?
A planar defect in which the stacking order of atomic planes is disrupted. It is a concern in epitaxial layers, thermal oxidation (OSF) and SiC crystals.
Field: Epitaxial growth
Stacking fault in the explanations
A stacking fault is a local disruption of the stacking sequence of atomic planes (ABCABC… on silicon {111} planes).
Which is a typical crystal defect in epitaxial layers in wh…
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Related terms
4H-SiC Autodoping Critical thickness Epitaxial growth Epitaxial lateral overgrowth (ELO) Heteroepitaxy HVPE (hydride vapor phase epitaxy) Lattice mismatch MBE (molecular beam epitaxy) Misfit dislocation