What is Epitaxial lateral overgrowth (ELO)?

Growing crystal from mask openings and letting it spread sideways over the mask. Dislocations from below do not propagate into the overgrown regions, reducing dislocations in materials such as GaN.

Field: Epitaxial growth

Epitaxial lateral overgrowth (ELO) in the explanations

Questions that mention Epitaxial lateral overgrowth (ELO) (1)

  1. In GaN and similar materials, what is the technique called that reduces dislocations by growing crystal from mask openings and then laterally over the mask?

Related terms

GaN (gallium nitride) 4H-SiC Autodoping Critical thickness Epitaxial growth Heteroepitaxy HVPE (hydride vapor phase epitaxy) Lattice mismatch MBE (molecular beam epitaxy) Misfit dislocation

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