What is Misfit dislocation?
A dislocation at the interface between crystals with different lattice constants that relieves strain. It forms when the grown layer exceeds the critical thickness.
Field: Epitaxial growth
A dislocation at the interface between crystals with different lattice constants that relieves strain. It forms when the grown layer exceeds the critical thickness.
Field: Epitaxial growth
4H-SiC Autodoping Critical thickness Epitaxial growth Epitaxial lateral overgrowth (ELO) Heteroepitaxy HVPE (hydride vapor phase epitaxy) Lattice mismatch MBE (molecular beam epitaxy) MOCVD (metal-organic chemical vapor deposition)