What is Seasoning?

Running dummy wafers before product to stabilize the condition of an etch (or similar) chamber's walls, since wall changes alter process results.

Field: Etching

Seasoning in the explanations

Seasoning runs dummy wafers after cleaning or part replacement to build a consistent wall coating and stabilize performance.
Because changes in the condition of an etch chamber's walls…

Questions that mention Seasoning (1)

Because changes in the condition of an etch chamber's walls alter results, what is it called to process dummy wafers before product to stabilize the chamber?

Related terms

Plasma ALE (atomic layer etching) Anisotropic etching Antenna effect ARDE (aspect-ratio-dependent etching) Ashing Aspect ratio Buffered hydrofluoric acid (BHF) Dry etching Endpoint detection

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