Etching

Because changes in the condition of an etch chamber's walls alter results, what is it called to process dummy wafers before product to stabilize the chamber?

  1. ASeasoning
  2. BAshing
  3. CDeposition
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Answer: A. Seasoning

Reaction products deposit on the walls of an etch chamber, and their condition changes, for example, the amount of radicals in the plasma. Processing dummy wafers after cleaning or at other times to condition the walls and stabilize results is called seasoning.

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More Etching questions

  1. What is an advantage of pulsed plasma, which etches while switching the RF power on and off?
  2. Which gases are commonly used for dry etching of GaN?
  3. Why is it difficult to pattern copper wiring directly by dry etching?
  4. In gate etching, what is the phenomenon called in which the pattern sidewall is undercut laterally near the boundary with the underlying insulator?
  5. Why are reaction products (polymers) left on pattern sidewalls removed after dry etching?