What is Passivation layer?
A film formed as the topmost layer of a chip to protect the circuitry from moisture, contamination and mechanical damage. Silicon nitride and polyimide are typical materials.
Field: Interconnect processes
Passivation layer in the explanations
Still, it blocks moisture and sodium and deposits at low temperature, making it the final passivation layer on chips and a diffusion barrier over copper wiring.
Which correctly describes silicon nitride deposited by plas…
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Related terms
Plasma CVD PECVD (plasma-enhanced CVD) Silane (SiH4) Air gap Backside power delivery Barrier metal Black's equation Crosstalk Damascene process