Process materials (gases and chemicals)

Which correctly describes phosphine (PH3) and arsine (AsH3), used to introduce n-type dopants?

  1. AThey are harmless and need no special control
  2. BThey are extremely toxic and require strict leak control
  3. CThey are nonflammable and odorless and safe to release into air
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Answer: B. They are extremely toxic and require strict leak control

Phosphine and arsine are extremely toxic gases, harmful even at very low concentrations. They are strictly controlled with gas cabinets, leak detectors and abatement systems. For greater safety, containers that supply the gas adsorbed at low pressure are also used.

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More Process materials (gases and chemicals) questions

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