What is Local exhaust ventilation?

Equipment that draws in gases and mists at their source, such as tools handling chemicals, and exhausts them. It keeps workers from inhaling hazardous substances.

Field: Environment, health and safety

Local exhaust ventilation in the explanations

Questions that mention Local exhaust ventilation (2)

  1. Why is care needed when handling GaAs wafer processing debris and waste?
  2. Which facility, used on equipment that handles chemicals and the like, captures generated gases and mists near their source and exhausts them?

Related terms

GaAs (gallium arsenide) Arsine (AsH3) Abatement system GHS Lockout/tagout (LOTO) Lower explosive limit (LEL) Oxygen deficiency Perfluorocarbons Risk assessment RoHS Directive

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