Compound semiconductors
Why is care needed when handling GaAs wafer processing debris and waste?
- ABecause it contains radioactive substances
- BBecause it contains arsenic and must be properly managed and treated as a hazardous substance
- CBecause it explodes on contact with air
Show answer and explanation
Answer: B. Because it contains arsenic and must be properly managed and treated as a hazardous substance
GaAs contains toxic arsenic, so dust and waste liquid from grinding and polishing, as well as discarded wafers, must be properly managed and treated according to regulations. Local exhaust ventilation and similar measures are also used to prevent worker exposure.