Process materials (gases and chemicals)

Which source gases are used to introduce the p-type dopant boron?

  1. ADiborane (B2H6) and boron trifluoride (BF3)
  2. BPhosphine (PH3)
  3. CArsine (AsH3)
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Answer: A. Diborane (B2H6) and boron trifluoride (BF3)

Boron is introduced using boron-containing gases such as diborane and boron trifluoride. Phosphine and arsine are sources of the n-type dopants phosphorus and arsenic. All of them are highly toxic or reactive and strictly controlled.

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