What is Selective epitaxial growth?
A method that grows crystal only where silicon is exposed, not on areas covered by insulating film. It is used for SiGe in transistor sources and drains and elsewhere.
Field: Epitaxial growth
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Related terms
CMOS SiGe (silicon-germanium) GAA (gate-all-around) 4H-SiC Autodoping Critical thickness Epitaxial growth Epitaxial lateral overgrowth (ELO) Heteroepitaxy HVPE (hydride vapor phase epitaxy)