What is Shadowing?

Shadowing in the explanations

• Tilting wafers for channeling control or halo implants leaves regions shadowed by tall resist or gates unimplanted—shadowing.

  When implanting with the wafer tilted, what is the phenomen…

• Top surfaces and trench entrances therefore receive film readily, while sidewalls and bottoms not in line of sight from the opening receive little (shadowing).

  In PVD such as sputtering and evaporation, why is it hard t…

Questions that mention Shadowing (2)

1. When implanting with the wafer tilted, what is the phenomenon called in which areas in the shadow of tall patterns such as resist receive no implant?
2. In PVD such as sputtering and evaporation, why is it hard to coat the sidewalls and bottoms of deep trenches?

Related terms

Channeling Sputtering CVD ALD Precursor Step coverage Annealing Faraday cup Halo implant (pocket implant) Implant dose