What is Threading dislocation?

A dislocation that runs up through the grown layer to the surface. GaN on sapphire or silicon has high densities (about 10⁸-10⁹ cm⁻²), which degrade device performance and reliability.

Field: Epitaxial growth

Related terms

4H-SiC Autodoping Critical thickness Epitaxial growth Epitaxial lateral overgrowth (ELO) Heteroepitaxy HVPE (hydride vapor phase epitaxy) Lattice mismatch MBE (molecular beam epitaxy) Misfit dislocation

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