What is SPC (statistical process control)?
A method of maintaining quality by monitoring process data with control charts and the like and detecting anomalies statistically.
Field: Yield and quality control
SPC (statistical process control) in the explanations
It is used as a method of actively correcting the process, in addition to SPC monitoring with control charts.
Which type of control automatically adjusts equipment proce…
Questions that mention SPC (statistical process control) (2)
- Which statistical process control technique monitors several mutually correlated characteristics together, rather than one at a time, to detect abnormal combinations?
- Which type of control automatically adjusts equipment processing conditions for the next lot or wafer based on, for example, measurement results from earlier steps?
Related terms
APC (advanced process control) CMP Cause-and-effect diagram Control chart FMEA (failure mode and effects analysis) Killer defect Pareto chart Poisson yield model Process capability index (Cpk) Systematic defect