Environment, health and safety

Check the basics of fab environment and safety — the hazards of hydrofluoric acid, SDSs, and PFC gases and global warming — with multiple-choice questions.

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Environment, health and safety: key points

Semiconductor fabs use many chemicals such as hydrofluoric acid, as well as toxic or flammable specialty gases. Understanding the hazards of chemicals and handling them correctly according to their SDS (safety data sheet) is fundamental.

Exhaust gases are treated by abatement systems before release. Reducing emissions of greenhouse gases such as PFCs, used for etching and chamber cleaning, is also an important issue.

All Environment, health and safety questions (50)

  1. Which correctly describes the handling of hydrofluoric acid?
  2. Which correctly describes an SDS (safety data sheet)?
  3. What is the main reason emissions of PFCs (perfluorocarbons), used for etching and equipment cleaning, are considered an environmental problem?
  4. Which correctly describes the typical handling of cylinders of toxic or flammable specialty gases?
  5. Which is a typical treatment method for wastewater containing hydrofluoric acid?
  6. Which facility, used on equipment that handles chemicals and the like, captures generated gases and mists near their source and exhausts them?
  7. Which combination of protective equipment is appropriate for work handling acid and alkali chemicals?
  8. Which system shows chemical hazards in an internationally harmonized way, using pictograms such as a skull or flame and hazard statements?
  9. Which EU regulation restricts the use of specified hazardous substances such as lead and mercury in electrical and electronic equipment?
  10. Which is an appropriate environmental initiative for the large amounts of water used in semiconductor fabs?
  11. What is appropriate first aid when a chemical gets in the eyes?
  12. What does the lower explosive limit (LEL) of a flammable gas mean?
  13. Which device absorbs and removes acidic gases and the like from exhaust gas by bringing it into contact with water or chemical solutions?
  14. Which is the international standard for environmental management systems?
  15. Which correctly describes the facilities that account for a large share of energy consumption in semiconductor fabs?
  16. In storing chemicals, why are substances that may react violently when mixed kept apart?
  17. In workplaces handling hazardous chemicals, what is it called to regularly measure concentrations of hazardous substances in the air and evaluate the work environment?
  18. What is the main reason waste liquids from semiconductor fabs are collected separately as acids, alkalis, fluorides, organic solvents and so on?
  19. Which occupational hazard requires particular attention where large amounts of nitrogen gas are used?
  20. In calculating a company's greenhouse gas emissions, which category covers direct emissions such as fuel combustion and process gas emissions at its own fabs?
  21. Which is the correct basic action when a toxic gas leak alarm sounds?
  22. For work using chemicals, what is the activity called that identifies hazards, estimates the magnitude of risk and decides countermeasures?
  23. In work handling organic solvents, what is the main purpose of grounding containers and piping?
  24. Which is the correct combination for the '3Rs', a philosophy for reducing waste?
  25. For chamber cleaning of CVD equipment, which method has been adopted to reduce PFC emissions?
  26. In first aid for hydrofluoric acid on the skin, which agent may be used after rinsing with plenty of water?
  27. Which is appropriate handling of waste containing hazardous substances such as arsenic?
  28. What is the activity called in which, before starting work, workers discuss the hazards hidden in the task and confirm countermeasures?
  29. Which is appropriate equipment to prepare for fire in a cleanroom?
  30. Which technique evaluates environmental impact across a product's whole life, from raw material procurement through manufacturing, use and disposal?
  31. What is the role of the large red emergency off (EMO) button on semiconductor manufacturing equipment?
  32. Which procedure, before tool maintenance, shuts off energy sources such as electricity and gas and attaches locks and tags so that no one can mistakenly turn them back on during the work?
  33. What is the purpose of reporting near misses, incidents that caused no injury but gave someone a scare?
  34. Which set correctly gives the "5S" widely practiced as a basis of workplace safety and quality?
  35. In fabs in earthquake-prone regions, which safety measure is commonly taken automatically when strong shaking is detected?
  36. In calculating a company's greenhouse gas emissions, which category covers indirect emissions from the use of purchased electricity and heat?
  37. In greenhouse gas accounting, which category includes emissions arising in the supply chain outside the company, such as manufacturing of raw materials and parts and transport and use of products?
  38. Which EU regulation requires businesses that manufacture or import chemicals to register substances and submit safety information, and manages the use of substances of very high concern?
  39. Which set correctly names the minerals (3TG) whose sourcing must be checked in electronics supply chains so they do not fund armed groups in conflict areas?
  40. Which group of substances, which hardly break down in the environment and are called "forever chemicals", poses regulatory compliance and substitution challenges for the semiconductor industry because they are used in resist materials and the like?
  41. Which international initiative brings together companies committed to supplying 100% of the electricity used in their operations from renewable energy?
  42. Which Japanese system requires businesses to determine and report to the government their releases of certain chemicals to the environment and their transfers as waste?
  43. Which correctly describes the occupational exposure limit of a hazardous chemical?
  44. In handling isopropyl alcohol (IPA), used for drying and cleaning wafers, which property requires particular care?
  45. Which correctly describes a hazard of hydrogen gas, used in epitaxial growth and annealing?
  46. Which SEMI standard is widely used in the industry as the design guideline for environmental, health and safety aspects of semiconductor manufacturing equipment?
  47. Why is skin contact with concentrated TMAH (tetramethylammonium hydroxide), used in developers, considered especially dangerous?
  48. What is the safety advantage of storing and supplying toxic gases such as arsine and phosphine adsorbed on a sorbent in containers below atmospheric pressure?
  49. Which abatement method is appropriate for removing extremely stable, hard-to-decompose PFCs such as CF4 from tool exhaust?
  50. In managing chemical exposure, which limit is set for short exposures such as 15 minutes, separately from the 8-hour average value?

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