Advanced transistors (FinFET and GAA)
In nanosheet GAA, what is the main role of the insulator (inner spacer) placed between the gate and the source/drain between the sheets?
- ATo reduce parasitic capacitance between the gate and source/drain and prevent shorts
- BTo make the channel emit light
- CTo amplify current
Show answer and explanation
Answer: A. To reduce parasitic capacitance between the gate and source/drain and prevent shorts
In nanosheet GAA, the gate extends into the gaps between the sheets and comes close to the source and drain. The inner spacer is the insulator placed between them, reducing gate-to-source/drain parasitic capacitance and preventing electrical shorts.