Advanced transistors (FinFET and GAA)
Which 3D integration method builds transistor layers one after another on the wafer, without bonding chips?
- A2.5D integration
- BMonolithic 3D integration (sequential 3D integration)
- CSiP
Show answer and explanation
Answer: B. Monolithic 3D integration (sequential 3D integration)
In monolithic 3D integration, after the first layer of transistors is built, a new semiconductor layer is formed on top and a second layer of transistors is built in it. Interlayer connections can be much finer than with bonding, but low-temperature processes are needed so that the heat of building the upper layer does not damage the lower one.