Advanced transistors (FinFET and GAA)
Which correctly describes the SOI (silicon on insulator) structure?
- AA transistor structure with no gate insulator
- BA structure in which transistors are built in a thin silicon layer on a buried oxide
- CA structure with two chips stacked
Show answer and explanation
Answer: B. A structure in which transistors are built in a thin silicon layer on a buried oxide
In SOI, transistors are built in a thin silicon layer on top of an oxide buried in the silicon substrate (the BOX layer). Because devices are insulated from the substrate, parasitic capacitance and leakage are small and latch-up does not occur. Fully depleted SOI (FD-SOI), with an extremely thin silicon layer, is used in low-power applications.