Environment, health and safety

Which device absorbs and removes acidic gases and the like from exhaust gas by bringing it into contact with water or chemical solutions?

  1. AULPA filter
  2. BOHT
  3. CWet scrubber
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Answer: C. Wet scrubber

A wet scrubber brings exhaust gas into contact with showers of water or neutralizing solutions, absorbing and removing water-soluble acidic and basic gases. It is used for fab-wide exhaust treatment and downstream of tool-level abatement systems.

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More Environment, health and safety questions

  1. Which is the international standard for environmental management systems?
  2. Which correctly describes the facilities that account for a large share of energy consumption in semiconductor fabs?
  3. In storing chemicals, why are substances that may react violently when mixed kept apart?
  4. In workplaces handling hazardous chemicals, what is it called to regularly measure concentrations of hazardous substances in the air and evaluate the work environment?
  5. What is the main reason waste liquids from semiconductor fabs are collected separately as acids, alkalis, fluorides, organic solvents and so on?