Environment, health and safety
What is the main reason emissions of PFCs (perfluorocarbons), used for etching and equipment cleaning, are considered an environmental problem?
- ABecause they are a main cause of water pollution
- BBecause they are a main cause of acid rain
- CBecause they are greenhouse gases with high global warming potential and long atmospheric lifetimes
Show answer and explanation
Answer: C. Because they are greenhouse gases with high global warming potential and long atmospheric lifetimes
PFCs such as CF4 and C2F6 are greenhouse gases with global warming potentials thousands of times that of CO2 or more, and they remain in the atmosphere for a very long time. The semiconductor industry works to cut emissions through decomposition in abatement systems, switching to alternative gases and optimizing usage.