Environment, health and safety

Which group of substances, which hardly break down in the environment and are called "forever chemicals", poses regulatory compliance and substitution challenges for the semiconductor industry because they are used in resist materials and the like?

  1. APFAS (per- and polyfluoroalkyl substances)
  2. BGlucose
  3. CSodium chloride
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Answer: A. PFAS (per- and polyfluoroalkyl substances)

PFAS is the umbrella term for thousands of organofluorine compounds with strong carbon-fluorine bonds; because they persist in the environment and the body, regulations are being tightened in Europe and the US. In semiconductors they are used in resist photoacid generators, surfactants, fluoropolymer parts and the like, and work is under way on substitutes and emission control.

  • A. Correct. It is the umbrella term for persistent organofluorine compounds.
  • B. Glucose is a sugar that breaks down easily.
  • C. Sodium chloride is table salt, not a PFAS.
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