Environment, health and safety

Which SEMI standard is widely used in the industry as the design guideline for environmental, health and safety aspects of semiconductor manufacturing equipment?

  1. ASEMI E10
  2. BSEMI M1
  3. CSEMI S2
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Answer: C. SEMI S2

SEMI S2 is the environmental, health and safety (EHS) guideline for semiconductor manufacturing equipment, setting requirements for protection against electrical, chemical, radiation and mechanical hazards, emergency off, interlocks, exhaust and more. Many equipment makers confirm compliance with it, and fabs commonly make it a condition of purchase.

  • A. SEMI E10 is the standard on equipment reliability metrics such as uptime.
  • B. SEMI M1 is the standard on silicon wafer specifications.
  • C. Correct. It is the EHS guideline for equipment.
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