Cleanrooms and equipment

For process equipment using vacuum, which device treats exhaust gas containing harmful substances produced by reactions, tool by tool?

  1. AAbatement system (local scrubber)
  2. BFFU
  3. CEFEM
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Answer: A. Abatement system (local scrubber)

Exhaust gas from deposition and etching equipment contains unreacted specialty gases and harmful by-products. An abatement system near the equipment renders them harmless by combustion, thermal decomposition, adsorption, water scrubbing and the like before sending them to the fab exhaust system.

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More Cleanrooms and equipment questions

  1. Which equipment is installed in semiconductor fabs to prevent loss of wafers in process due to voltage sags or power outages?
  2. Which ISO 14644-1 cleanliness class corresponds to Class 100 of the former US federal standard (no more than 100 particles of 0.5 µm or larger per cubic foot)?
  3. What is a typical guideline for the air velocity blown from the ceiling in downflow cleanrooms?
  4. In bay-and-chase cleanrooms, how is the cleanliness of the maintenance space behind equipment (the chase) typically handled?
  5. Which element can be released from glass-fiber filters and similar sources and cause unintended doping (contamination) of wafers?