What is Piezoresistive effect?
The change in a material's electrical resistivity under mechanical stress. It is especially large in silicon and is used in semiconductor pressure sensors and similar devices.
Field: MEMS and sensors
The change in a material's electrical resistivity under mechanical stress. It is especially large in silicon and is used in semiconductor pressure sensors and similar devices.
Field: MEMS and sensors
Stress alters silicon's band structure, changing its resistivity tens of times more than a metal strain gauge (the piezoresistive effect).
Which correctly describes the piezoresistive effect used in…Accelerometer Anodic bonding Bosch process (deep RIE) Capacitive sensing Coriolis force Gyroscope Hall-effect sensor MEMS Sacrificial layer etching Stiction