What is Piezoresistive effect?

The change in a material's electrical resistivity under mechanical stress. It is especially large in silicon and is used in semiconductor pressure sensors and similar devices.

Field: MEMS and sensors

Piezoresistive effect in the explanations

Questions that mention Piezoresistive effect (1)

  1. Which correctly describes the piezoresistive effect used in semiconductor pressure sensors?

Related terms

Accelerometer Anodic bonding Bosch process (deep RIE) Capacitive sensing Coriolis force Gyroscope Hall-effect sensor MEMS Sacrificial layer etching Stiction

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