What is Crystal orientation?
The direction of crystal planes and axes, expressed with Miller indices such as (100). The (100) surface is standard for silicon wafers used for MOSFETs.
Field: Silicon wafers
Crystal orientation in the explanations
A notch is a V-shaped cut about 1 mm deep on the wafer edge marking the crystal orientation (for example, the <110> direction).
What is the main role of the notch (small cutout) on the ed…(100) wafers tend to crack along {110} planes perpendicular to the surface, producing straight fractures at right angles, whose directions reveal the wafer's crystal orientation.
Along which crystal planes does single-crystal silicon clea…Growth depends little on crystal orientation and rounds STI trench corners uniformly, so ISSG is used for liner oxides, gate oxides and reoxidation of nitride films.
Which method reacts hydrogen and oxygen near the wafer surf…
Questions that mention Crystal orientation (6)
- Which crystal orientation is commonly used for silicon wafers for CMOS LSIs?
- How does the thermal oxidation rate of silicon depend on crystal orientation?
- What is the main role of the notch (small cutout) on the edge of a silicon wafer?
- Along which crystal planes does single-crystal silicon cleave most easily?
- Which method reacts hydrogen and oxygen near the wafer surface to form a high-quality thin oxide in a short time?
- Which is a characteristic of radical oxidation, which uses oxygen radicals?
Related terms
Mobility Radical CMOS Threshold voltage Thermal oxidation ALD Notch STI (shallow trench isolation) Plasma FinFET