What is Phase-shift mask?
A photomask that shifts the phase of light passing through neighboring openings, using interference to improve image contrast and resolution.
Field: Lithography
Phase-shift mask in the explanations
A phase-shift mask shifts the phase of light through certain regions by 180°, so amplitudes from neighboring features cancel at their boundaries, darkening dark regions and sharpening edge contrast.
What is the purpose of a phase-shift mask?
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Related terms
ArF excimer laser Bottom anti-reflective coating (BARC) Chemically amplified resist Depth of focus (DOF) EUV lithography High-NA EUV Immersion lithography Line edge roughness (LER) Multiple patterning Nanoimprint lithography