Silicon wafers

Which crystal orientation is commonly used for silicon wafers for CMOS LSIs?

  1. A(111)
  2. B(100)
  3. C(211)
Show answer and explanation

Answer: B. (100)

CMOS LSIs commonly use (100) wafers, because the (100) surface has a low density of interface states at the SiO2 interface, giving good MOS transistor characteristics. (111) wafers were once used for bipolar devices and similar applications.

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More Silicon wafers questions

  1. Which correctly describes the relationship between the resistivity of a silicon wafer and its doping concentration?
  2. Which is closest to the standard thickness of a 300 mm silicon wafer?
  3. In the CZ method, what is the main purpose of controlling the ratio of pull rate to temperature gradient in the crystal (V/G)?
  4. Which is the typical method for producing high-purity polycrystalline silicon?
  5. What is a wafer called that is run through a process separately from products to check equipment condition or measure film thickness?