Silicon wafers
Along which crystal planes does single-crystal silicon cleave most easily?
- A{100} planes
- B{111} planes
- C{110} planes
Show answer and explanation
Answer: B. {111} planes
Silicon cleaves most easily along {111} planes. A (100) wafer tends to break along {111} planes inclined to the surface or {110} planes perpendicular to it, and the straight fracture lines can even be used to infer the wafer's crystal orientation.
- A. {100} is the surface plane of a (100) wafer, not the easiest cleavage plane.
- B. Correct. Silicon cleaves most easily along {111}.
- C. Silicon also cleaves along {110}, but {111} is the easiest.