Advanced transistors (FinFET and GAA)

What is the basic way to reduce metal-semiconductor contact resistance?

  1. AHeavily dope the semiconductor at the contact to thin the barrier and make tunneling easier
  2. BMake the semiconductor at the contact extremely lightly doped
  3. CInsert a thick oxide between the metal and semiconductor
Show answer and explanation

Answer: A. Heavily dope the semiconductor at the contact to thin the barrier and make tunneling easier

A Schottky barrier forms at the metal-semiconductor interface. Heavily doping the semiconductor side thins the barrier, so carriers tunnel through it easily and contact resistance falls. Silicide formation and choosing materials with low barriers are also used.

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