Advanced packaging (3D and chiplets)
Which correctly describes the conditions required of the surfaces to be joined in hybrid bonding?
- AThe surfaces should be roughened
- BVery high flatness and cleanliness at the nanometer level
- CA thick oil film on the surface
Show answer and explanation
Answer: B. Very high flatness and cleanliness at the nanometer level
Because hybrid bonding directly joins surfaces of copper electrodes and dielectric without bumps, the bonding surfaces must be flat at the nanometer level and free of particles and contamination. Even a tiny particle can cause unbonded cavities (voids). CMP and cleaning technologies are important.