What is Nanoimprint lithography?
Transferring patterns by pressing a mold with fine features into resist on the wafer. It can make fine patterns without expensive optics.
Field: Lithography
Nanoimprint lithography in the explanations
Nanoimprint lithography presses a template bearing a relief pattern into liquid resist on the wafer, cures it with UV light and separates the template, copying the shape.
What is the technique called that transfers a pattern by pr…
Questions that mention Nanoimprint lithography (1)
Related terms
3D NAND Overlay ArF excimer laser Bottom anti-reflective coating (BARC) Chemically amplified resist Depth of focus (DOF) EUV lithography High-NA EUV Immersion lithography Line edge roughness (LER)