What is EFEM?

Short for equipment front end module: the unit at the front of a tool that opens FOUPs and transfers wafers into the tool in a clean environment. It includes load ports and a transfer robot.

Field: Cleanrooms and equipment

EFEM in the explanations

An EFEM (Equipment Front End Module) houses, in a clean space, the load ports where FOUPs are placed, the mechanism that opens their doors, and the robot that takes out wafers and carries them into the equipment.
Which unit at the front of process equipment opens FOUP doo…

Questions that mention EFEM (1)

Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?

Related terms

FOUP Airborne molecular contamination (AMC) Downflow FFU (fan filter unit) HEPA filter ISO 14644-1 Mini-environment OHT (overhead hoist transport) ULPA filter

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