What is FOUP?
A sealed container for transporting and storing 300 mm wafers.
Field: Cleanrooms and equipment
FOUP in the explanations
A FOUP (Front Opening Unified Pod) is a front-opening container for transporting and storing 300 mm wafers sealed inside.
Which correctly describes a FOUP?Wafers can be moved between equipment and FOUP without being exposed to outside air.
Which unit at the front of process equipment opens FOUP doo…With air inside a FOUP, wafer surfaces may oxidize or pick up moisture and molecular contamination during waiting time between steps.
What is the main purpose of replacing (purging) the inside …
Questions that mention FOUP (7)
- Which correctly describes a FOUP?
- Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?
- What is the main purpose of replacing (purging) the inside of a FOUP with nitrogen?
- Which is closest to the mass of one silicon wafer 300 mm in diameter and 775 µm thick? (Silicon density is about 2.33 g/cm³.)
- What is the approach called that keeps only the small space around wafers at high cleanliness?
- In 300 mm wafer fabs, which system automatically transports FOUPs between tools along rails on the ceiling?
- Which mini-environment method, widespread in the 200 mm era, carries cassettes in sealed pods and delivers them to equipment?
Related terms
OHT (overhead hoist transport) Mini-environment EFEM Airborne molecular contamination (AMC) Downflow FFU (fan filter unit) HEPA filter ISO 14644-1 ULPA filter