What is ULPA filter?

A high-performance air filter that captures even finer particles than a HEPA filter. It is used in the ceilings of high-cleanliness cleanrooms.

Field: Cleanrooms and equipment

ULPA filter in the explanations

Questions that mention ULPA filter (2)

  1. Which device, arrayed on the ceiling, integrates a filter and fan to deliver clean air?
  2. Which is the common definition of HEPA filter performance?

Related terms

FFU (fan filter unit) HEPA filter Airborne molecular contamination (AMC) Downflow EFEM FOUP ISO 14644-1 Mini-environment OHT (overhead hoist transport)

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