Cleanrooms and equipment

Which unit at the front of process equipment opens FOUP doors and transfers wafers into the equipment while keeping them in a clean environment?

  1. AOHT
  2. BULPA filter
  3. CEFEM (equipment front-end module, including load ports and transfer robots)
Show answer and explanation

Answer: C. EFEM (equipment front-end module, including load ports and transfer robots)

An EFEM (Equipment Front End Module) houses, in a clean space, the load ports where FOUPs are placed, the mechanism that opens their doors, and the robot that takes out wafers and carries them into the equipment. Wafers can be moved between equipment and FOUP without being exposed to outside air.

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More Cleanrooms and equipment questions

  1. Which correctly describes the properties required of cleanroom suits?
  2. Which device, arrayed on the ceiling, integrates a filter and fan to deliver clean air?
  3. Which is one correct reason for not letting cleanroom humidity become extremely low?
  4. Which items are strictly restricted from being brought into a cleanroom?
  5. Which correctly describes the typical approach to equipment layout in semiconductor fabs?