Cleanrooms and equipment

Which mini-environment method, widespread in the 200 mm era, carries cassettes in sealed pods and delivers them to equipment?

  1. AFOUP
  2. BSMIF
  3. CEFEM
Show answer and explanation

Answer: B. SMIF

SMIF (Standard Mechanical Interface) carries wafer cassettes in sealed pods; on the equipment, the bottom of the pod opens and the cassette is taken into the equipment. It spread the mini-environment concept and evolved into the 300 mm FOUP.

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