What is OHT (overhead hoist transport)?
Vehicles that run along ceiling rails and automatically carry FOUPs between tools. They are the backbone of automated transport in 300 mm fabs.
Field: Cleanrooms and equipment
OHT (overhead hoist transport) in the explanations
A FOUP holding 25 300-mm wafers totals around 8 kg, so fabs move them with overhead hoist transport (OHT).
Which is closest to the mass of one silicon wafer 300 mm in…An OHT is a vehicle running on ceiling rails that hangs FOUPs and automatically carries them to equipment load ports.
In 300 mm wafer fabs, which system automatically transports…It connects to transport systems such as OHT and dispatches the needed FOUPs on instructions from the manufacturing execution system.
In a fab's automated material handling system, which automa…
Questions that mention OHT (overhead hoist transport) (4)
- Which is closest to the mass of one silicon wafer 300 mm in diameter and 775 µm thick? (Silicon density is about 2.33 g/cm³.)
- In 300 mm wafer fabs, which system automatically transports FOUPs between tools along rails on the ceiling?
- In a fab's automated material handling system, which automated storage holds FOUPs temporarily until their next process step?
- In automated transport in a bay-type fab, which pair correctly names transport between bays and transport linking tools within a bay?
Related terms
FOUP Airborne molecular contamination (AMC) Downflow EFEM FFU (fan filter unit) HEPA filter ISO 14644-1 Mini-environment ULPA filter