Keeping only the small space around the wafers highly clean. Sealed carriers such as FOUPs combined with EFEMs on the tools lower the cleanliness required of the room as a whole, reducing cost.
Field: Cleanrooms and equipment
It spread the mini-environment concept and evolved into the 300 mm FOUP.
Which mini-environment method, widespread in the 200 mm era…In the mini-environment approach, only spaces that wafers touch, such as FOUP and equipment interiors, are kept extremely clean, while cleanliness in spaces where people work is somewhat relaxed.
What is the approach called that keeps only the small space…FOUP Airborne molecular contamination (AMC) Downflow EFEM FFU (fan filter unit) HEPA filter ISO 14644-1 OHT (overhead hoist transport) ULPA filter