What is HEPA filter?
A high-efficiency air filter that captures at least 99.97% of 0.3 µm particles. Filters that capture even finer particles are ULPA filters.
Field: Cleanrooms and equipment
HEPA filter in the explanations
A HEPA filter is defined as having a collection efficiency of at least 99.97% for particles of about 0.3 µm, close to the size that is hardest to filter (as in JIS and other standards).
Which is the common definition of HEPA filter performance?
Questions that mention HEPA filter (1)
Related terms
ULPA filter Airborne molecular contamination (AMC) Downflow EFEM FFU (fan filter unit) FOUP ISO 14644-1 Mini-environment OHT (overhead hoist transport)