What is Oxidation-enhanced diffusion (OED)?

Faster diffusion of boron and phosphorus during oxidation than without it, caused by silicon interstitials injected into the silicon by the oxidation.

Field: Oxidation and diffusion

Oxidation-enhanced diffusion (OED) in the explanations

Boron and phosphorus diffuse largely via interstitials, so their diffusion speeds up several-fold during oxidation (oxidation-enhanced diffusion, OED).
What is the phenomenon called in which boron and phosphorus…

Questions that mention Oxidation-enhanced diffusion (OED) (1)

What is the phenomenon called in which boron and phosphorus diffuse faster during silicon oxidation than without oxidation?

Related terms

Bird's beak Deal-Grove model Drive-in Dry oxidation Forming gas anneal Interface states LOCOS Mobile ions Oxynitride (SiON) RTP (rapid thermal processing)

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