Silicon wafers
Which impurity is incorporated in relatively large amounts from the crucible into silicon crystals grown by the CZ method?
- AGold
- BOxygen
- CHelium
Show answer and explanation
Answer: B. Oxygen
In the CZ method, silicon is melted in a quartz (SiO2) crucible, so oxygen dissolved from the crucible is incorporated into the crystal. Oxygen has benefits, such as strengthening the crystal and forming precipitates that act as gettering sites, but too much causes defects, so its concentration is controlled.