Silicon wafers

Which correctly describes the relationship between the resistivity of a silicon wafer and its doping concentration?

  1. AThe higher the doping, the higher the resistivity
  2. BDoping and resistivity are unrelated
  3. CThe higher the doping, the lower the resistivity
Show answer and explanation

Answer: C. The higher the doping, the lower the resistivity

Adding more dopant increases the number of carriers, so resistivity decreases. Wafer resistivity is used as an indicator of doping and is specified in wafer specifications. At very high doping, however, impurity scattering lowers mobility, so resistivity is not simply inversely proportional to doping.

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  1. Which is closest to the standard thickness of a 300 mm silicon wafer?
  2. In the CZ method, what is the main purpose of controlling the ratio of pull rate to temperature gradient in the crystal (V/G)?
  3. Which is the typical method for producing high-purity polycrystalline silicon?
  4. What is a wafer called that is run through a process separately from products to check equipment condition or measure film thickness?
  5. What is the main reason silicon wafers must be very flat?