What is Thermal donor?
Oxygen clusters that act as donors when CZ silicon is heated around 450°C. Because they change the wafer's resistivity, they are annihilated by a higher-temperature treatment.
Field: Silicon wafers
Related terms
Crystal orientation Czochralski (CZ) method DZ (denuded zone) FZ method (float zone) Gettering Ingot MCZ method (magnetic-field-applied CZ) Monitor wafer Necking Notch